ICICS X027 - MEMS
UBC MEMS Laboratory
Research Objectives of the UBC MEMS Laboratory
Infrastructure at UBC for MEMS Fabrication and TestingCurrent Research Topics
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Faculty Members:
Lab Members:
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Equipment
| Laser Doppler Vibrometer | ![]() The laser Doppler vibrometer Polytec OFV-5000 allows single-point vibration measurement. It is coupled into a microscope to measure vertical surface motion of MEMS devices. Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| MicroPIV | ![]() The LaVision Flow Master 2-D µPIV System is designed to measure velocity fields of particle seeded flows with micron scale spatial resolution using particle image velocimetry (PIV) techniques. The light source is a double pulsed Nd:YAG laser that is focused by an epifluorescence microscope with a high numerical aperture on a microfluidic device. Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| Optical Profiler | ![]() The Wyko NT1100 Optical Profiling System provides accurate, non- contact surface metrology at sub-nanometer vertical resolution. The optional Through Transmissive Material (TTM) capability of this tool allows measurement of the topology of a sample through an optically transparent material such as a glass cover. Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| Inverted Fluorescence Microscope, Nikon | ![]() Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| MEMS Pro | ![]() MEMS Pro™ is engineered by MEMS designers for non-specialists and MEMS specialists alike, providing a unified MEMS and IC design environment. Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| Probe Station, Signatone S-1160 | ![]() Optical Microscope with needle tip manipulators Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |
| Wire-bonder | ![]() Wire bonding machines are used to connect electrical wires to silicon chips Location of Equipment: Further Details (MiNa members only): Super User: | ![]() |

Faculty Members:






