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Filters: keyword is DC voltage reference; MEMS stability; Reproducibility; Pull-in
2004
Rocha, L. A., Cretu, E., Wolffenbuttel, R. F., "Full characterisation of pull-in in single-sided clamped beams", Sensors and Actuators A: Physical, vol. Volume 110, no. Issues 1-3, pp. 301-309, 1 February. Abstract Tagged XML BibTex