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MEMS microscanning lens

Abstract

A magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane (PDMS) microlens is demonstrated. The device is driven by an external AC magnetic field, eliminating chip circuitry and thermal deformation from joule heating. The resonant frequency of 215.2 Hz and scanning angle of 23 of the scanner have been demonstrated.

Project Description

Optical diagnoses of human tissues via fluorescent excitation, molecular absorption, and elastic and inelastic (Raman) scattering have been studied intensively over the last two decades. Recent attempt has combined Raman spectroscopy with confocal imaging to
perform microscale spectral analysis of skin tissues in vivo. However, these devices are
initially developed with conventional bulky optical and opto-mechanical components and are not convenient for routine clinical uses. Miniaturization of these devices, especially the optical scanners will greatly enhance their clinical utility.
This research a new magnetically actuated scanning microlens. Mechanical and optical characterizations will be
investigated.

Faculty Supervisor(s)

    muchiao   

Researchers(s)

    Billy