MEMS microscanning lens
A magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane (PDMS) microlens is demonstrated. The device is driven by an external AC magnetic field, eliminating chip circuitry and thermal deformation from joule heating. The resonant frequency of 215.2 Hz and scanning angle of 23 of the scanner have been demonstrated.
Optical diagnoses of human tissues via fluorescent excitation, molecular absorption, and elastic and inelastic (Raman) scattering have been studied intensively over the last two decades. Recent attempt has combined Raman spectroscopy with confocal imaging to